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Xiao Li, Babak Bakhit, M. P. Johansson Joesaar, Ivan Petrov, Lars Hultman, Grzegorz Greczynski
(2022)
Dense, single-phase, hard, and stress-free Ti0.32Al0.63W0.05N films grown by magnetron sputtering with dramatically reduced energy consumption
Scientific Reports
, Vol. 12
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Xiao Li, Babak Bakhit, M. P. Johansson Joesaar, Ivan Petrov, Lars Hultman, Grzegorz Greczynski
(2021)
Towards energy-efficient physical vapor deposition: Mapping out the effects of W+ energy and concentration on the densification of TiAlWN thin films grown with no external heating
Surface & Coatings Technology
, Vol. 424
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Xiao Li, Babak Bakhit, M. P. Johansson Joesaar, Lars Hultman, Ivan Petrov, Grzegorz Greczynski
(2021)
Toward energy-efficient physical vapor deposition: Routes for replacing substrate heating during magnetron sputter deposition by employing metal ion irradiation
Surface & Coatings Technology
, Vol. 415
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