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Linköping University
Xiao Li

Photo of Xiao Li

Xiao Li

PhD student

Contact

xiao.li@liu.se
+46 13 28 29 45
2945
0000-0001-7378-8554

Organisation

Department of Physics, Chemistry and Biology (IFM)
Thin Film Physics (TUNNF)

Visiting address

Campus Valla, Fysikhuset, Entrance 57, Room G210

Publications
Research
Education

Publications

2023

Xiao Li, Ivan Petrov, Lars Hultman, Grzegorz Greczynski (2023) Determining role of W+ ions in the densification of TiAlWN thin films grown by hybrid HiPIMS/DCMS technique with no external heating Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 41, Article 013407

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2022

Xiao Li, Babak Bakhit, M. P. Johansson Joesaar, Ivan Petrov, Lars Hultman, Grzegorz Greczynski (2022) Dense, single-phase, hard, and stress-free Ti_0.32Al_0.63W_0.05N films grown by magnetron sputtering with dramatically reduced energy consumption Scientific Reports, Vol. 12

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2021

Xiao Li, Babak Bakhit, M. P. Johansson Joesaar, Ivan Petrov, Lars Hultman, Grzegorz Greczynski (2021) Towards energy-efficient physical vapor deposition: Mapping out the effects of W+ energy and concentration on the densification of TiAlWN thin films grown with no external heating Surface & Coatings Technology, Vol. 424

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Xiao Li, Babak Bakhit, M. P. Johansson Joesaar, Lars Hultman, Ivan Petrov, Grzegorz Greczynski (2021) Toward energy-efficient physical vapor deposition: Routes for replacing substrate heating during magnetron sputter deposition by employing metal ion irradiation Surface & Coatings Technology, Vol. 415

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Tags

Agora Materiae Graduate School
Unit of Fundamental science of thin films (TFTUNN)
Thin Film Physics (TUNNF)
Department of Physics, Chemistry and Biology (IFM)
Linköping University (LIU)
Employee
Xiao Li (xiali37)
PhD student

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Linköping University

SE-581 83 Linköping
Sweden

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+46 13 281000

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