“Here, we can 3D-coat even threaded holes, and the machine can coat much larger surfaces than we previously could. Also, we can reach much higher temperatures than with our other machines,” says Urban Forsberg, senior associate professor of semiconductor materials and the person responsible for research collaboration with SGL Carbon.
At the heart of the collaboration is a new research tool, which arrived at LiU in August 2025 after years of intense engineering. It is custom designed as a result of the research collaboration with SGL Carbon that has been going on since 2015. The machine uses metal precursors, which are then deposited as a very thin and even coating on a substrate.
This process, called chemical vapour deposition, abbreviated as CVD, is crucial in the manufacture of semiconductor materials.
Independence
The reason why SGL Carbon chose to join forces with academia is the EU’s goal to double its world share of semiconductor production from 10 to 20 per cent by 2030, which is deemed necessary in order to reduce dependence on semiconductors from e.g. Taiwan, the United States and China.
In early 2022, the EU launched a call for so-called Important Projects of Common European Interest (IPCEI), where European companies in the microelectronics and communications sector could apply for funding for research, development and production. One of the companies selected was the multinational company SGL Carbon, headquartered in Wiesbaden, Germany. They have a strong focus on graphite components for semiconductor production tools.
Within this IPCEI project, SGL Carbon and Linköping University, are setting up a research facility in Linköping together with Urban Forsberg and his colleagues at the Department of Physics, Chemistry and Biology at LiU. SGL Carbon chose LiU because the university has maintained a highly productive research environment in close collaboration with industry partners for many years.
Inside a machine that manufactures semiconductors using CVD technology, several components are made of graphite, such as heating elements and substrate holders. Graphite parts need to be encapsulated in a durable and diffusion-proof coating to increase lifetime and increase the purity of the semiconductor material manufactured in the machine. SGL Carbon is one of the leading manufacturers of this type of components, which they then sell on to the semiconductor industry.
Extreme environments
Also the encapsulation of the graphite parts can be done in a CVD machine. But achieving three-dimensional encapsulation that can withstand extreme temperatures and harsh chemical environments is a challenge. This is where Urban Forsberg and his colleagues come into the picture.
“SGL Carbon are experts in manufacturing graphite parts for machines used in semiconductor production. Today, they use silicon carbide to coat the graphite. Now they want to expand their portfolio to include coatings of even more robust materials such as tantalum carbide. But developing a high-quality coating of this kind is a major technological challenge that requires intensive research.”
The idea is that LiU researchers will use the new research tool at Campus Valla to coat, for example, a substrate holder with tantalum carbide. The substrate holder will then be used in actual semiconductor manufacturing.
“When the sample has reached its maximum lifespan in industry use, we get it back to examine what has happened to the coating. Being able to obtain this kind of real-world feedback is crucial for improving the coating further,” says Urban Forsberg.
Symbiosis
The properties of the coating have a significant impact on performance and yield in a semiconductor process. Extending the lifespan by just a few per cent can mean savings of several million in the semiconductor industry.
The collaboration between LiU and SGL Carbon has now deepened further and the results are very promising. Urban Forsberg believes that this type of industrial collaboration will gain ground in academia.
“This collaboration provides funding for our research that would otherwise have been difficult to obtain. And it makes the gap between research and actual utilisation much shorter. For me as a researcher, it’s hugely satisfying to see that my research is used by industry; that’s one of my driving forces.”
Matts Karlsson is Vice-Rector for Research at LiU. He agrees with Urban Forsberg and believes that industry collaborations are immensely important for the university.
"It creates connections in both directions and becomes a symbiosis that accelerates development. The research collaboration with SGL Carbon is impressive and is proof that an intensive exchange of knowledge can lead to rapid innovation real-world use,” says Matts Karlsson.
