Publikationer
Jui-Che Chang
(2022)
Metastable orthorhombic Ta3N5 thin films grown by magnetron sputter epitaxy
Jui-Che Chang, Jens Birch, Gueorgui Kostov Gueorguiev, Babak Bakhit, Grzegorz Greczynski, Fredrik Eriksson, Per Sandström, Lars Hultman, Ching-Lien Hsiao
(2022)
Domain epitaxial growth of Ta3N5 film on c-plane sapphire substrate
Surface & Coatings Technology, Vol. 443, Artikel 128581
Vidare till DOI
Jui-Che Chang, Fredrik Eriksson, Mauricio A. Sortica, Grzegorz Greczynski, Babak Bakhit, Zhang-Jun Hu, Daniel Primetzhofer, Lars Hultman, Jens Birch, Ching-Lien Hsiao
(2021)
Orthorhombic Ta3-xN5-yOy thin films grown by unbalanced magnetron sputtering: The role of oxygen on structure, composition, and optical properties
Surface & Coatings Technology, Vol. 406
Vidare till DOI
