Semiconductor Technology, 12 credits

Halvledarteknik och tillverkning, 12 hp

TNE058

The course is disused.

Main field of study

Electrical Engineering Applied Physics

Course level

Second cycle

Course type

Programme course

Examiner

Amir Baranzahi

Director of studies or equivalent

Adriana Serban

Education components

Preliminary scheduled hours: 120 h
Recommended self-study hours: 200 h

Available for exchange students

Yes
ECV = Elective / Compulsory / Voluntary
Course offered for Semester Period Timetable module Language Campus ECV
6CIEN Electronics Design Engineering, M Sc in Engineering 7 (Autumn 2020) 1, 2 3, 2 Swedish/English Norrköping, Norrköping C

Main field of study

Electrical Engineering, Applied Physics

Course level

Second cycle

Advancement level

A1X

Course offered for

  • Electronics Design Engineering, M Sc in Engineering

Specific information

The course is scheduled for the last time HT2020. 

Entry requirements

Note: Admission requirements for non-programme students usually also include admission requirements for the programme and threshold requirements for progression within the programme, or corresponding.

Prerequisites

The students attending this course should have basic knowledge in physics and mathematics. The student should be able to solve system of equations, differential equations and have good knowledge in differential and integral calculus. Student should have basic knowledge in Newtonian mechanics and classical physics, electromagnetism, optics and wave. It is expected that the student have some knowledge from modern physics and can use Shrödinger equation on simple systems

Intended learning outcomes

The aim of the course is to present the fundamental principle of semiconductor devices and how models of devices can be created from this understanding. How the semiconductor devices are fabricated? Basic unit processes will be presented. The students get the basic knowledge that is necessary to understand, work and produce integrated circuits and optoelectronics. After this course the student should

  • Describe manufacturing steps, lithography, oxidation, metallization, and etching.
  • Integrate the manufacturing steps for manufacturing of bipolar transistors, MOSFET, CMOS and MEMS.
  • Explain the terms, band gap, energy level, mobility, effective mass, charge generation and recombination, doping, drift, diffusion, equilibrium and steady state.
  • •Apply relations between band gap, energy level, mobility, effective mass, charge generation and recombination, doping, drift, diffusion, conductivity, current density, temperature and illumination in semiconductors.
  • Calculate and determine the material parameters (band gap, doping, level, carrier lifetime, diffusion length) from electrical characteristics of semiconductor devices.
  • Design pn-junctions, Schottky diodes, bipolar transistor, MOSFET, and pn-solar cells having given characteristics.
  • Design pn-junctions, Schottky diodes, bipolar transistor, and MOSFET.

Course content

Basic semiconductor physics, concept and mechanisms such as band diagram, valence- and conduction band, Fermi level, Fermi-Dirac statistics, band gap, effective mass, drift, diffusion, doping, intrinsic, extrinsic, electron-hole pair, charge generation and recombination, minority carriers, majority carriers etc. will be discussed thoroughly. Function and modelling of pn-junctions, contact potential, depletion region, and different break down mechanisms for pn-junctions will be explained. Functions and I-V characteristics of some other devices such as MOSFET and bipolar transistors will also be discussed. Basic unit processes such as ion implantation, diffusion, thermal oxidation, annealing, deposition processes such as evaporation, sputtering, CVD, epitaxial growth, fabrication processes such as optical and non-optical lithography, photoresist and etching will be introduced. The students should enter deeply into one of the subjects below and present their work for the whole class. Device isolation, Contacts and metallization, CMOS technology, GaAs technology, bipolar technology and MEMS. Laboratory assignment includes classical labs with diode and transistor measurements.

Teaching and working methods

Lectures and tutorial. Laboratory work, Weekly Home assignment , Student oral presentations. Mandatory attendance of some lectures and during student presentations.
The course runs over the entire autumn semester.

Examination

UPG2Optional assignments0 creditsU, G
DUG1Midterm Short Exam2 creditsU, G
UPG1Assignment, Written and Oral Presentation1 creditsU, G
LAB1Laboratory work1 creditsU, G
TEN1Written Examination8 creditsU, 3, 4, 5
Mandatory attendance during student presentations

Grades

Four-grade scale, LiU, U, 3, 4, 5

Other information

Supplementary courses: Solar Cell Technology, Power Electronics,and Charge Transport in Organic and Inorganic Materials, System Design.

About teaching and examination language

The teaching language is presented in the Overview tab for each course. The examination language relates to the teaching language as follows: 

  • If teaching language is Swedish, the course as a whole or in large parts, is taught in Swedish. Please note that although teaching language is Swedish, parts of the course could be given in English. Examination language is Swedish. 
  • If teaching language is Swedish/English, the course as a whole will be taught in English if students without prior knowledge of the Swedish language participate. Examination language is Swedish or English (depending on teaching language). 
  • If teaching language is English, the course as a whole is taught in English. Examination language is English. 

Other

The course is conducted in a manner where both men's and women's experience and knowledge are made visible and developed. 

The planning and implementation of a course should correspond to the course syllabus. The course evaluation should therefore be conducted with the course syllabus as a starting point.  

Department

Institutionen för teknik och naturvetenskap

Director of Studies or equivalent

Adriana Serban

Examiner

Amir Baranzahi

Course website and other links

http://www2.itn.liu.se/utbildning/kurs/index.html?coursecode=TNE058

Education components

Preliminary scheduled hours: 120 h
Recommended self-study hours: 200 h

Course literature

Books

  • Jasprit Singh, (2004) Semiconductor Devices, basic principles
    ISBN: 0-471-36245-X
    Wiley & Sons
Code Name Scope Grading scale
UPG2 Optional assignments 0 credits U, G
DUG1 Midterm Short Exam 2 credits U, G
UPG1 Assignment, Written and Oral Presentation 1 credits U, G
LAB1 Laboratory work 1 credits U, G
TEN1 Written Examination 8 credits U, 3, 4, 5
Mandatory attendance during student presentations

Course syllabus

A syllabus must be established for each course. The syllabus specifies the aim and contents of the course, and the prior knowledge that a student must have in order to be able to benefit from the course.

Timetabling

Courses are timetabled after a decision has been made for this course concerning its assignment to a timetable module. 

Interrupting a course

The vice-chancellor’s decision concerning regulations for registration, deregistration and reporting results (Dnr LiU-2015-01241) states that interruptions in study are to be recorded in Ladok. Thus, all students who do not participate in a course for which they have registered must record the interruption, such that the registration on the course can be removed. Deregistration from a course is carried out using a web-based form: https://www.lith.liu.se/for-studenter/kurskomplettering?l=en. 

Cancelled courses

Courses with few participants (fewer than 10) may be cancelled or organised in a manner that differs from that stated in the course syllabus. The Dean is to deliberate and decide whether a course is to be cancelled or changed from the course syllabus. 

Guidelines relating to examinations and examiners 

For details, see Guidelines for education and examination for first-cycle and second-cycle education at Linköping University, http://styrdokument.liu.se/Regelsamling/VisaBeslut/917592.

An examiner must be employed as a teacher at LiU according to the LiU Regulations for Appointments (https://styrdokument.liu.se/Regelsamling/VisaBeslut/622784). For courses in second-cycle, the following teachers can be appointed as examiner: Professor (including Adjunct and Visiting Professor), Associate Professor (including Adjunct), Senior Lecturer (including Adjunct and Visiting Senior Lecturer), Research Fellow, or Postdoc. For courses in first-cycle, Assistant Lecturer (including Adjunct and Visiting Assistant Lecturer) can also be appointed as examiner in addition to those listed for second-cycle courses. In exceptional cases, a Part-time Lecturer can also be appointed as an examiner at both first- and second cycle, see Delegation of authority for the Board of Faculty of Science and Engineering.

Forms of examination

Examination

Written and oral examinations are held at least three times a year: once immediately after the end of the course, once in August, and once (usually) in one of the re-examination periods. Examinations held at other times are to follow a decision of the board of studies.

Principles for examination scheduling for courses that follow the study periods:

  • courses given in VT1 are examined for the first time in March, with re-examination in June and August
  • courses given in VT2 are examined for the first time in May, with re-examination in August and October
  • courses given in HT1 are examined for the first time in October, with re-examination in January and August
  • courses given in HT2 are examined for the first time in January, with re-examination in March and in August.

The examination schedule is based on the structure of timetable modules, but there may be deviations from this, mainly in the case of courses that are studied and examined for several programmes and in lower grades (i.e. 1 and 2). 

Examinations for courses that the board of studies has decided are to be held in alternate years are held three times during the school year in which the course is given according to the principles stated above.

Examinations for courses that are cancelled or rescheduled such that they are not given in one or several years are held three times during the year that immediately follows the course, with examination scheduling that corresponds to the scheduling that was in force before the course was cancelled or rescheduled.

When a course is given for the last time, the regular examination and two re-examinations will be offered. Thereafter, examinations are phased out by offering three examinations during the following academic year at the same times as the examinations in any substitute course. If there is no substitute course, three examinations will be offered during re-examination periods during the following academic year. Other examination times are decided by the board of studies. In all cases above, the examination is also offered one more time during the academic year after the following, unless the board of studies decides otherwise.

If a course is given during several periods of the year (for programmes, or on different occasions for different programmes) the board or boards of studies determine together the scheduling and frequency of re-examination occasions.

Registration for examination

In order to take an examination, a student must register in advance at the Student Portal during the registration period, which opens 30 days before the date of the examination and closes 10 days before it. Candidates are informed of the location of the examination by email, four days in advance. Students who have not registered for an examination run the risk of being refused admittance to the examination, if space is not available.

Symbols used in the examination registration system:

  ** denotes that the examination is being given for the penultimate time.

  * denotes that the examination is being given for the last time.

Code of conduct for students during examinations

Details are given in a decision in the university’s rule book: http://styrdokument.liu.se/Regelsamling/VisaBeslut/622682.

Retakes for higher grade

Students at the Institute of Technology at LiU have the right to retake written examinations and computer-based examinations in an attempt to achieve a higher grade. This is valid for all examination components with code “TEN” and "DAT". The same right may not be exercised for other examination components, unless otherwise specified in the course syllabus.

A retake is not possible on courses that are included in an issued degree diploma. 

Retakes of other forms of examination

Regulations concerning retakes of other forms of examination than written examinations and computer-based examinations are given in the LiU guidelines for examinations and examiners, http://styrdokument.liu.se/Regelsamling/VisaBeslut/917592.

Plagiarism

For examinations that involve the writing of reports, in cases in which it can be assumed that the student has had access to other sources (such as during project work, writing essays, etc.), the material submitted must be prepared in accordance with principles for acceptable practice when referring to sources (references or quotations for which the source is specified) when the text, images, ideas, data, etc. of other people are used. It is also to be made clear whether the author has reused his or her own text, images, ideas, data, etc. from previous examinations, such as degree projects, project reports, etc. (this is sometimes known as “self-plagiarism”).

A failure to specify such sources may be regarded as attempted deception during examination.

Attempts to cheat

In the event of a suspected attempt by a student to cheat during an examination, or when study performance is to be assessed as specified in Chapter 10 of the Higher Education Ordinance, the examiner is to report this to the disciplinary board of the university. Possible consequences for the student are suspension from study and a formal warning. More information is available at https://www.student.liu.se/studenttjanster/lagar-regler-rattigheter?l=en.

Grades

The grades that are preferably to be used are Fail (U), Pass (3), Pass not without distinction (4) and Pass with distinction (5). 

  1. Grades U, 3, 4, 5 are to be awarded for courses that have written examinations.
  2. Grades Fail (U) and Pass (G) may be awarded for courses with a large degree of practical components such as laboratory work, project work and group work.
  3. Grades Fail (U) and Pass (G) are to be used for degree projects and other independent work.

Examination components

  1. Grades U, 3, 4, 5 are to be awarded for written examinations (TEN).
  2. Examination components for which the grades Fail (U) and Pass (G) may be awarded are laboratory work (LAB), project work (PRA), preparatory written examination (KTR), oral examination (MUN), computer-based examination (DAT), home assignment (HEM), and assignment (UPG).
  3. Students receive grades either Fail (U) or Pass (G) for other examination components in which the examination criteria are satisfied principally through active attendance such as other examination (ANN), tutorial group (BAS) or examination item (MOM).
  4. Grades Fail (U) and Pass (G) are to be used for the examination components Opposition (OPPO) and Attendance at thesis presentation (AUSK) (i.e. part of the degree project).

For mandatory components, the following applies: If special circumstances prevail, and if it is possible with consideration of the nature of the compulsory component, the examiner may decide to replace the compulsory component with another equivalent component. (In accordance with the LiU Guidelines for education and examination for first-cycle and second-cycle education at Linköping University, http://styrdokument.liu.se/Regelsamling/VisaBeslut/917592). 

For written examinations, the following applies: If the LiU coordinator for students with disabilities has granted a student the right to an adapted examination for a written examination in an examination hall, the student has the right to it. If the coordinator has instead recommended for the student an adapted examination or alternative form of examination, the examiner may grant this if the examiner assesses that it is possible, based on consideration of the course objectives. (In accordance with the LiU Guidelines for education and examination for first-cycle and second-cycle education at Linköping University, http://styrdokument.liu.se/Regelsamling/VisaBeslut/917592).

The examination results for a student are reported at the relevant department.

Regulations (apply to LiU in its entirety)

The university is a government agency whose operations are regulated by legislation and ordinances, which include the Higher Education Act and the Higher Education Ordinance. In addition to legislation and ordinances, operations are subject to several policy documents. The Linköping University rule book collects currently valid decisions of a regulatory nature taken by the university board, the vice-chancellor and faculty/department boards.

LiU’s rule book for education at first-cycle and second-cycle levels is available at http://styrdokument.liu.se/Regelsamling/Innehall/Utbildning_pa_grund-_och_avancerad_niva. 

Books

Jasprit Singh, (2004) Semiconductor Devices, basic principles

ISBN: 0-471-36245-X

Wiley & Sons

Note: The course matrix might contain more information in Swedish.

I = Introduce, U = Teach, A = Utilize
I U A Modules Comment
1. DISCIPLINARY KNOWLEDGE AND REASONING
1.1 Knowledge of underlying mathematics and science (G1X level)
X

                            
1.2 Fundamental engineering knowledge (G1X level)
X

                            
1.3 Further knowledge, methods, and tools in one or several subjects in engineering or natural science (G2X level)
X
X
DUG1
LAB1
TEN1
UPG1

                            
1.4 Advanced knowledge, methods, and tools in one or several subjects in engineering or natural sciences (A1X level)

                            
1.5 Insight into current research and development work

                            
2. PERSONAL AND PROFESSIONAL SKILLS AND ATTRIBUTES
2.1 Analytical reasoning and problem solving
X
X
X
LAB1
TEN1

                            
2.2 Experimentation, investigation, and knowledge discovery
X
X
LAB1

                            
2.3 System thinking

                            
2.4 Attitudes, thought, and learning
X
X
DUG1
LAB1
TEN1
UPG1

                            
2.5 Ethics, equity, and other responsibilities
X
X
DUG1
LAB1
TEN1
UPG1

                            
3. INTERPERSONAL SKILLS: TEAMWORK AND COMMUNICATION
3.1 Teamwork
X
X
LAB1
UPG1

                            
3.2 Communications
X
X
X
UPG1

                            
3.3 Communication in foreign languages
X
X
UPG1

                            
4. CONCEIVING, DESIGNING, IMPLEMENTING AND OPERATING SYSTEMS IN THE ENTERPRISE, SOCIETAL AND ENVIRONMENTAL CONTEXT
4.1 External, societal, and environmental context

                            
4.2 Enterprise and business context

                            
4.3 Conceiving, system engineering and management

                            
4.4 Designing

                            
4.5 Implementing

                            
4.6 Operating

                            
5. PLANNING, EXECUTION AND PRESENTATION OF RESEARCH DEVELOPMENT PROJECTS WITH RESPECT TO SCIENTIFIC AND SOCIETAL NEEDS AND REQUIREMENTS
5.1 Societal conditions, including economic, social, and ecological aspects of sustainable development for knowledge development

                            
5.2 Economic conditions for knowledge development

                            
5.3 Identification of needs, structuring and planning of research or development projects

                            
5.4 Execution of research or development projects

                            
5.5 Presentation and evaluation of research or development projects

                            

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