Peggy Bagherzadeh Tabrizi
PhD student
Publications
2026
On the role of surface oxidation for the nucleation delay in ALD of AlN
Journal of Materials Chemistry C
(Article in journal)
https://dx.doi.org/10.1039/d6tc02829b
Pulsed e-CVD of iron containing films
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 44, Article 033406
(Article in journal)
https://dx.doi.org/10.1116/6.0005365
Surface Chemistry in the Initial Stages of Titanium Nitride Atomic Layer Deposition Using Operando Ambient Pressure X-ray Photoelectron Spectroscopy
Chemistry of Materials, Vol. 38, p. 1902-1914
(Article in journal)
https://dx.doi.org/10.1021/acs.chemmater.5c02974