Charles Wijayawardhana
Adjunct Associate Professor
Publications
2023
Superconformal silicon carbide coatings via precursor pulsed chemical vapor deposition
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 41, Article 030403
(Article in journal)
https://dx.doi.org/10.1116/6.0002461
2022
Growth of silicon carbide multilayers with varying preferred growth orientation
Surface & Coatings Technology, Vol. 447, Article 128853
(Article in journal)
https://dx.doi.org/10.1016/j.surfcoat.2022.128853
Conformal and superconformal chemical vapor deposition of silicon carbide coatings
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 40, Article 053402
(Article in journal)
https://dx.doi.org/10.1116/6.0001909