Igor Zhirkov
Principal Research Engineer
Postdoktor
Publications
2025
DC arc plasma generation and thin film deposition from an industrial scale TiB2 cathode
Surface & Coatings Technology, Vol. 516, Article 132804
(Article in journal)
https://dx.doi.org/10.1016/j.surfcoat.2025.132804
2024
Stable DC vacuum arc plasma generation from a 100 mm TiB2 cathode
Surface & Coatings Technology, Vol. 484, Article 130824
(Article in journal)
https://dx.doi.org/10.1016/j.surfcoat.2024.130824
Determination of effective Ga/N ratio to control GaN growth behavior in liquid-target reactive magnetron sputter epitaxy
Materials Science in Semiconductor Processing, Vol. 176, Article 108292
(Article in journal)
https://dx.doi.org/10.1016/j.mssp.2024.108292
High-power impulse magnetron sputter deposition of TiBx thin films: Effects of pulse length and peak current density
Vacuum, Vol. 222, Article 113070
(Article in journal)
https://dx.doi.org/10.1016/j.vacuum.2024.113070
2023
A comparison of plasma generation, plasma transport, and film formation for a DC vacuum arc source with Ti-X compound cathodes (X = W, C, Al, and Si)
Journal of Applied Physics, Vol. 133, Article 233301
(Article in journal)
https://dx.doi.org/10.1063/5.0154489