Igor Zhirkov

Publikationer

2024

Igor Zhirkov, Andrejs Petruhins, Peter Polcik, Szilard Kolozsvari, Philipp Immich, Johanna Rosén (2024) Stable DC vacuum arc plasma generation from a 100 mm TiB2 cathode Surface & Coatings Technology, Vol. 484, Artikel 130824 Vidare till DOI

Yi-Ling Lo, Aditya Prabaswara, Jui-Che Chang, Samiran Bairagi, Igor Zhirkov, Per Sandström, Johanna Rosén, Kenneth Järrendahl, Lars Hultman, Jens Birch, Ching-Lien Hsiao (2024) Determination of effective Ga/N ratio to control GaN growth behavior in liquid-target reactive magnetron sputter epitaxy Materials Science in Semiconductor Processing, Vol. 176, Artikel 108292 Vidare till DOI

Niklas Hellgren, Igor Zhirkov, Mauricio A. Sortica, Andrejs Petruhins, Grzegorz Greczynski, Lars Hultman, Johanna Rosén (2024) High-power impulse magnetron sputter deposition of TiB_x thin films: Effects of pulse length and peak current density Vacuum, Vol. 222, Artikel 113070 Vidare till DOI

2023

Igor Zhirkov, Peter Polcik, Andrejs Petruhins, Szilard Kolozsvari, Johanna Rosén (2023) A comparison of plasma generation, plasma transport, and film formation for a DC vacuum arc source with Ti-X compound cathodes (X = W, C, Al, and Si) Journal of Applied Physics, Vol. 133, Artikel 233301 Vidare till DOI

2022

Claudia Schnitter, Ivan Petrov, Igor Zhirkov, Lars Hultman, Justinas Palisaitis, Johanna Rosén, Hans Högberg (2022) Effect of low-energy ion assistance on the properties of sputtered ZrB2 films Vacuum, Vol. 195, Artikel 110688 Vidare till DOI