Urban Forsberg
Professor
Publications
2026
Growth and optical properties of polar-, nonpolar, and semi-polar wurtzite ScGaN films
Applied Physics Letters, Vol. 129, Article 031902
(Article in journal)
https://dx.doi.org/10.1063/5.0325421
2023
Superconformal silicon carbide coatings via precursor pulsed chemical vapor deposition
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 41, Article 030403
(Article in journal)
https://dx.doi.org/10.1116/6.0002461
Reflections about reflections
Proceedings of the 19th CDIO International Conference, p. 56-66
(Conference paper)
2022
Growth of silicon carbide multilayers with varying preferred growth orientation
Surface & Coatings Technology, Vol. 447, Article 128853
(Article in journal)
https://dx.doi.org/10.1016/j.surfcoat.2022.128853
Conformal and superconformal chemical vapor deposition of silicon carbide coatings
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 40, Article 053402
(Article in journal)
https://dx.doi.org/10.1116/6.0001909