Urban Forsberg
Biträdande professor
Publikationer
2023
Superconformal silicon carbide coatings via precursor pulsed chemical vapor deposition
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 41, Artikel 030403
(Artikel i tidskrift)
https://dx.doi.org/10.1116/6.0002461
Reflections about reflections
Proceedings of the 19th CDIO International Conference, s. 56-66
(Konferensbidrag)
2022
Growth of silicon carbide multilayers with varying preferred growth orientation
Surface & Coatings Technology, Vol. 447, Artikel 128853
(Artikel i tidskrift)
https://dx.doi.org/10.1016/j.surfcoat.2022.128853
Conformal and superconformal chemical vapor deposition of silicon carbide coatings
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 40, Artikel 053402
(Artikel i tidskrift)
https://dx.doi.org/10.1116/6.0001909
Controlled CVD Growth of Highly ⟨111⟩-Oriented 3C-SiC
The Journal of Physical Chemistry C, Vol. 126, s. 9918-9925
(Artikel i tidskrift)
https://dx.doi.org/10.1021/acs.jpcc.2c01171