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Swetha Suresh Babu, Martin Rudolph, Daniel Lundin, Tetsuhide Shimizu, Joel Fischer, Michael A. Raadu, Nils Brenning, Jon Tomas Gudmundsson
(2022)
Modeling of high power impulse magnetron sputtering discharges with tungsten target
Plasma sources science & technology, Vol. 31
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M. Rudolph, Nils Brenning, H. Hajihoseini, M. A. Raadu, Joel Fischer, J. T. Gudmundsson, Daniel Lundin
(2022)
Operating modes and target erosion in high power impulse magnetron sputtering
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 40
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J. T. Gudmundsson, Joel Fischer, B. P. Hinriksson, M. Rudolph, Daniel Lundin
(2022)
Ionization region model of high power impulse magnetron sputtering of copper
Surface & Coatings Technology, Vol. 442
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