Publikationer
Max Renner, Joel Fischer, H. Hajihoseini, J. T. Gudmundsson, M. Rudolph, Daniel Lundin
(2023)
Angular distribution of titanium ions and neutrals in high-power impulse magnetron sputtering discharges
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 41, Artikel 033009
Vidare till DOI
Swetha Suresh Babu, Martin Rudolph, Peter John Ryan, Joel Fischer, Daniel Lundin, James W. Bradley, Jon Tomas Gudmundsson
(2023)
High power impulse magnetron sputtering of tungsten: a comparison of experimental and modelling results
Plasma sources science & technology, Vol. 32, Artikel 034003
Vidare till DOI
H. Hajihoseini, N. Brenning, M. Rudolph, M. A. Raadu, Daniel Lundin, Joel Fischer, T. M. Minea, J. T. Gudmundsson
(2023)
Target ion and neutral spread in high power impulse magnetron sputtering
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 41, Artikel 013002
Vidare till DOI
Swetha Suresh Babu, Martin Rudolph, Daniel Lundin, Tetsuhide Shimizu, Joel Fischer, Michael A. Raadu, Nils Brenning, Jon Tomas Gudmundsson
(2022)
Modeling of high power impulse magnetron sputtering discharges with tungsten target
Plasma sources science & technology, Vol. 31
Vidare till DOI
M. Rudolph, Nils Brenning, H. Hajihoseini, M. A. Raadu, Joel Fischer, J. T. Gudmundsson, Daniel Lundin
(2022)
Operating modes and target erosion in high power impulse magnetron sputtering
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 40
Vidare till DOI
