Örjan Danielsson
Head of Department, Senior Associate Professor
Publications
2026
Environmental sustainability analysis of hard coating TiN chemical vapor deposition by life cycle assessment
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 44, Article 043404
(Article in journal)
https://dx.doi.org/10.1116/6.0005395
2020
Perspective-Current Understanding of the Halogenated Deposition Chemistry for Chemical Vapor Deposition of SiC
ECS Journal of Solid State Science and Technology, Vol. 9, Article 104006
(Article in journal)
https://dx.doi.org/10.1149/2162-8777/abbf2e
A Systematic Method for Predictive In Silico Chemical Vapor Deposition
The Journal of Physical Chemistry C, Vol. 124, p. 7725-7736
(Article in journal)
https://dx.doi.org/10.1021/acs.jpcc.9b10874
2019
CVD growth and properties of on-axis vanadium doped semi-insulating 4H-SiC epilayers
Journal of Applied Physics, Vol. 125, Article 045702
(Article in journal)
https://dx.doi.org/10.1063/1.5057389
2018
Growth Mechanism of SiC CVD: Surface Etching by H-2, H Atoms, and HCl
Journal of Physical Chemistry A, Vol. 122, p. 2503-2512
(Article in journal)
https://dx.doi.org/10.1021/acs.jpca.7b10800