Pentti Niiranen

Publications

2024

Arun Haridas Choolakkal, Pentti Niiranen, Samira Dorri, Jens Birch, Henrik Pedersen (2024) Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition Nature Communications, Vol. 15 (Article in journal) Continue to DOI

Pamburayi Mpofu, Houyem Hafdi, Pentti Niiranen, Jonas Lauridsen, Oscar Alm, Tommy Larsson, Henrik Pedersen (2024) Surface chemistry in atomic layer deposition of AlN thin films from Al(CH₃)₃ and NH₃ studied by mass spectrometry Journal of Materials Chemistry C, Vol. 12, p. 12818-12824 (Article in journal) Continue to DOI

Pentti Niiranen, Anna Kapran, Hama Nadhom, Martin Cada, Zdenek Hubicka, Henrik Pedersen, Daniel Lundin (2024) Plasma electron characterization in electron chemical vapor deposition Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 42, Article 023006 (Article in journal) Continue to DOI

2023

Pentti Niiranen, Hama Nadhom, Michal Zanaska, Robert Boyd, Mauricio Sortica, Daniel Primetzhofer, Daniel Lundin, Henrik Pedersen (2023) Biased quartz crystal microbalance method for studies of chemical vapor deposition surface chemistry induced by plasma electrons Review of Scientific Instruments, Vol. 94, Article 023902 (Article in journal) Continue to DOI

2022

Rouzbeh Samii, Anton Fransson, Pamburayi Mpofu, Pentti Niiranen, Lars Ojamäe, Vadim Kessler, Nathan O´brien (2022) Synthesis, Structure, and Thermal Properties of Volatile Group 11 Triazenides as Potential Precursors for Vapor Deposition Inorganic Chemistry, Vol. 61, p. 20804-20813 (Article in journal) Continue to DOI