Pentti Niiranen

Publications

2025

Pamburayi Mpofu, Pentti Niiranen, Oscar Alm, Jonas Lauridsen, Tommy Larsson, Henrik Pedersen (2025) Atomic layer deposition of AlxTi1-xN via co-evaporation of metal precursors Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 43, Article 032405 (Article in journal) Continue to DOI

Arun Haridas Choolakkal, Pamburayi Mpofu, Pentti Niiranen, Jens Birch, Henrik Pedersen (2025) Using a Heavy Inert Diffusion Additive for Superconformal Atomic Layer Deposition The Journal of Physical Chemistry Letters, Vol. 16, p. 2369-2372 (Article in journal) Continue to DOI

Pentti Niiranen, Felicia Andersson, Daniel Lundin, Lars Ojamäe, Henrik Pedersen (2025) Plasma decomposition of ferrocene Journal of Chemical Physics, Vol. 162, Article 034703 (Article in journal) Continue to DOI

2024

Arun Haridas Choolakkal, Pentti Niiranen, Samira Dorri, Jens Birch, Henrik Pedersen (2024) Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition Nature Communications, Vol. 15 (Article in journal) Continue to DOI

Pamburayi Mpofu, Houyem Hafdi, Pentti Niiranen, Jonas Lauridsen, Oscar Alm, Tommy Larsson, Henrik Pedersen (2024) Surface chemistry in atomic layer deposition of AlN thin films from Al(CH₃)₃ and NH₃ studied by mass spectrometry Journal of Materials Chemistry C, Vol. 12, p. 12818-12824 (Article in journal) Continue to DOI