Pentti Niiranen

Publications

2025

Pentti Niiranen (2025) Electron CVD: From Instrumentation to Self-limiting Deposition

Premrudee Promdet, Pentti Niiranen, Simon Lagerkvist, Daniel Lundin, Henrik Pedersen (2025) Self-limiting deposition of copper from copper beta-diketonates and plasma electrons Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 43, Article 040402 (Article in journal) Continue to DOI

Pamburayi Mpofu, Pentti Niiranen, Oscar Alm, Jonas Lauridsen, Tommy Larsson, Henrik Pedersen (2025) Atomic layer deposition of AlxTi1-xN via co-evaporation of metal precursors Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 43, Article 032405 (Article in journal) Continue to DOI

Arun Haridas Choolakkal, Pamburayi Mpofu, Pentti Niiranen, Jens Birch, Henrik Pedersen (2025) Using a Heavy Inert Diffusion Additive for Superconformal Atomic Layer Deposition The Journal of Physical Chemistry Letters, Vol. 16, p. 2369-2372 (Article in journal) Continue to DOI

Pentti Niiranen, Felicia Andersson, Daniel Lundin, Lars Ojamäe, Henrik Pedersen (2025) Plasma decomposition of ferrocene Journal of Chemical Physics, Vol. 162, Article 034703 (Article in journal) Continue to DOI