Pentti Niiranen

Publikationer

2025

Premrudee Promdet, Pentti Niiranen, Simon Lagerkvist, Daniel Lundin, Henrik Pedersen (2025) Self-limiting deposition of copper from copper beta-diketonates and plasma electrons Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 43, Artikel 040402 (Artikel i tidskrift) Vidare till DOI

Pamburayi Mpofu, Pentti Niiranen, Oscar Alm, Jonas Lauridsen, Tommy Larsson, Henrik Pedersen (2025) Atomic layer deposition of AlxTi1-xN via co-evaporation of metal precursors Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 43, Artikel 032405 (Artikel i tidskrift) Vidare till DOI

Arun Haridas Choolakkal, Pamburayi Mpofu, Pentti Niiranen, Jens Birch, Henrik Pedersen (2025) Using a Heavy Inert Diffusion Additive for Superconformal Atomic Layer Deposition The Journal of Physical Chemistry Letters, Vol. 16, s. 2369-2372 (Artikel i tidskrift) Vidare till DOI

Pentti Niiranen, Felicia Andersson, Daniel Lundin, Lars Ojamäe, Henrik Pedersen (2025) Plasma decomposition of ferrocene Journal of Chemical Physics, Vol. 162, Artikel 034703 (Artikel i tidskrift) Vidare till DOI

2024

Arun Haridas Choolakkal, Pentti Niiranen, Samira Dorri, Jens Birch, Henrik Pedersen (2024) Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition Nature Communications, Vol. 15 (Artikel i tidskrift) Vidare till DOI