penni81

Pentti Niiranen

Doktorand

Publikationer

2025

Arun Haridas Choolakkal, Pamburayi Mpofu, Pentti Niiranen, Jens Birch, Henrik Pedersen (2025) Using a Heavy Inert Diffusion Additive for Superconformal Atomic Layer Deposition The Journal of Physical Chemistry Letters, Vol. 16, s. 2369-2372 (Artikel i tidskrift) Vidare till DOI
Pentti Niiranen, Felicia Andersson, Daniel Lundin, Lars Ojamäe, Henrik Pedersen (2025) Plasma decomposition of ferrocene Journal of Chemical Physics, Vol. 162, Artikel 034703 (Artikel i tidskrift) Vidare till DOI

2024

Arun Haridas Choolakkal, Pentti Niiranen, Samira Dorri, Jens Birch, Henrik Pedersen (2024) Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition Nature Communications, Vol. 15 (Artikel i tidskrift) Vidare till DOI
Pamburayi Mpofu, Houyem Hafdi, Pentti Niiranen, Jonas Lauridsen, Oscar Alm, Tommy Larsson, Henrik Pedersen (2024) Surface chemistry in atomic layer deposition of AlN thin films from Al(CH3)3 and NH3 studied by mass spectrometry Journal of Materials Chemistry C, Vol. 12, s. 12818-12824 (Artikel i tidskrift) Vidare till DOI
Pentti Niiranen, Anna Kapran, Hama Nadhom, Martin Cada, Zdenek Hubicka, Henrik Pedersen, Daniel Lundin (2024) Plasma electron characterization in electron chemical vapor deposition Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 42, Artikel 023006 (Artikel i tidskrift) Vidare till DOI