Photo of Sachin Sharma

Sachin Sharma

Chemical Vapor Deposition of Epitaxial Boron-Carbon-Nitrogen Thin Films 

Overview 

I work with a Hot-Wall Chemical Vapor Deposition (CVD) setup to grow and characterize Boron Nitride and Boron Carbide thin films. With a focus on investigating the chemistry and process parameters that affect the epitaxial growth of these material systems in CVD.

Affiliations

Publications

2024

Sachin Sharma, Laurent Souqui, Justinas Palisaitis, Duc Quang Hoang, Ivan Gueorguiev Ivanov, Per O A Persson, Hans Högberg, Henrik Pedersen (2024) On the origin of epitaxial rhombohedral-B4C growth by CVD on 4H-SiC Dalton Transactions, Vol. 53, p. 10730-10736 (Article in journal) Continue to DOI
Sachin Sharma (2024) Phase Evolution of Boron Nitride and Carbide during Chemical Vapor Deposition
Sachin Sharma, Justinas Palisaitis, Ivan Gueorguiev Ivanov, Per O A Persson, Henrik Pedersen, Hans Högberg (2024) The Influence of Carbon on Polytype and Growth Stability of Epitaxial Hexagonal Boron Nitride Films Advanced Materials Interfaces (Article in journal) Continue to DOI

2022

Laurent Souqui, Sachin Sharma, Hans Högberg, Henrik Pedersen (2022) Texture evolution in rhombohedral boron carbide films grown on 4H-SiC(0001) and 4H-SiC(0001) substrates by chemical vapor deposition Dalton Transactions, Vol. 51, p. 15974-15982 (Article in journal) Continue to DOI
Sachin Sharma, Laurent Souqui, Henrik Pedersen, Hans Högberg (2022) Chemical vapor deposition of sp(2)-boron nitride films on Al2O3 (0001), (11 2 over bar 0), (1 1 over bar 02), and (10 1 over bar 0) substrates Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 40, Article 033404 (Article in journal) Continue to DOI