Photo of Grzegorz Greczynski

Grzegorz Greczynski

Professor, Head of Unit

Head of the Fundamental Science of Thin Films unit at the Department of Physics, Chemistry and Biology, LiU. Expert in high power impulse magnetron sputtering (HiPIMS) and X-ray Photoelectron Spectroscopy (XPS)

Presentation

My research interests are presently focused on low-energy ion/surface interactions (including both gas and metal ions) for nanostructure control during low-temperature growth of transition-metal-based nitride, boride, and carbide thin films by physical vapor deposition. In addition, I'm active in the field of X-ray photoelectron spectroscopy (XPS), with the aim to develop nondestructive analysis methods and to increase reliability of the technique.

I received my MSc degree in Materials Physics in 1997 from University of Science and Technology, Krakow, Poland as well as from Linköping University, Sweden.

In 2001 I obtained PhD in Materials Physics for the thesis “Photoelectron Spectroscopy Studies of Conjugated Polymer Surfaces and Interfaces for Organic-based Light Emitting Devices” under supervision of Prof. William R. Salaneck and the opponent was Prof. Hans Siegbahn.

Between 2001 and 2008 I worked in industry, first for Thin Film Electronics AB and later for Chemfilt Ionsputtering AB. The latter company pioneered the novel magnetron sputtering technique - high-power impulse magnetron sputtering (HiPIMS or HPPMS) which has become very popular in the recent years.

In 2009, I rejoined academia as an Assistant Professor of Thin Film Physics working with Professor Lars Hultman. My close collaborators are Professors Joe Greene and Ivan Petrov from University of Illinois (USA) and Professor Jochen Schneider from Aachen University (Germany).

In 2018 I was nominated Fellow of the American Vacuum Society for "seminal contributions to nondestructive XPS surface analysis, and the development of novel next-generation HiPIMS metal-ion deposition techniques".

Publications

2025

Faezeh Alijan Farzad Lahiji, Biplab Paul, Grzegorz Greczynski, Ganpati Ramanath, Arnaud le Febvrier, Per Eklund (2025) Phase selection and texturing in molybdenum oxide films grown by reactive magnetron sputtering Applied Physics Letters, Vol. 127, Article 011602 (Article in journal) Continue to DOI
Bartosz Wicher, Justinas Palisaitis, Vladyslav Rogoz, Mauricio A. Sortica, Peter Polcik, Szilard Kolozsvari, Lars Hultman, Grzegorz Greczynski (2025) Synthesis of Hard Boron Thin Films by Low Frequency Magnetron Sputtering Materials & design, Vol. 257, Article 114404 (Article in journal) Continue to DOI
Grzegorz Greczynski (2025) Revealing the nature of surface charging during X-ray photoelectron spectroscopy analysis of thin film insulators with metal capping layers Applied Surface Science, Vol. 709, Article 163853 (Article in journal) Continue to DOI
Jui-Che Chang, Justinas Palisaitis, Shailesh Kalal, Gueorgui Kostov Gueorguiev, Axel Persson, Eric Nestor Tseng, Grzegorz Greczynski, Per O A Persson, Jianwu Sun, Yu-Kuei Hsu, Lars Hultman, Jens Birch, Ching-Lien Hsiao (2025) The Role of a Ta2O5 Seed Layer on Phase Evolution and Epitaxial Growth of Ta3N5 Thin Films on Al2O3(0001) ACS Applied Energy Materials (Article in journal) Continue to DOI
Susmita Chowdhury, Hector Guerra Yanez, Sanath Kumar Honnali, Grzegorz Greczynski, Per O A Persson, Arnaud Le Febvrier, Martin Magnuson, Per Eklund (2025) Structural and electronic properties of Sc1-xWxNy thin films on MgO(001) Applied Materials Today, Vol. 44, Article 102730 (Article in journal) Continue to DOI

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