2021 Henrik Pedersen, Sean T. Barry, Jonas Sundqvist (2021) Green CVD-Toward a sustainable philosophy for thin film deposition by chemical vapor deposition Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 39 Vidare till DOI
Henrik Pedersen, Sean T. Barry, Jonas Sundqvist (2021) Green CVD-Toward a sustainable philosophy for thin film deposition by chemical vapor deposition Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 39 Vidare till DOI