2023 Sanath Kumar Honnali, Charlotte Poterie, Arnaud Le Febvrier, Daniel Lundin, Grzegorz Greczynski, Per Eklund (2023) Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 41, Artikel 043402 Vidare till DOI
Sanath Kumar Honnali, Charlotte Poterie, Arnaud Le Febvrier, Daniel Lundin, Grzegorz Greczynski, Per Eklund (2023) Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, Vol. 41, Artikel 043402 Vidare till DOI